Semiconductor device assembly with die support structures

ABSTRACT

A semiconductor device assembly is provided. The assembly includes a first semiconductor die and a second semiconductor die disposed over the first semiconductor die. The assembly further includes a plurality of die support structures between the first and second semiconductor dies and a plurality of interconnects between the first and second semiconductor dies. Each of the plurality of die support structures includes a stand-off pillar and a stand-off pad having a first bond material with a first solder joint thickness between them. Each of the plurality of interconnects includes a conductive pillar and a conductive pad having a second bond material with a second solder joint thickness between them. The first solder joint thickness is less than the second solder joint thickness.

CROSS-REFERENCE TO RELATED APPLICATION(S)

This application is a continuation of U.S. patent application Ser. No.15/603,175, filed May 23, 2017, which is incorporated herein byreference.

This application contains subject matter related to U.S. patentapplication Ser. No. 15/603,327, filed May 23, 2017, entitled“SEMICONDUCTOR DEVICE ASSEMBLY WITH SURFACE-MOUNT DIE SUPPORTSTRUCTURES.” The related application, of which the disclosure isincorporated by reference herein, is assigned to Micron Technology,Inc., and is identified by attorney docket number 010829-9203.US00.

TECHNICAL FIELD

The disclosed embodiments relate to semiconductor device assemblieshaving die support structures. In several embodiments, the presenttechnology relates to die support structures configured to mechanicallysupport mechanical and/or electrical interconnects positioned betweenstacked semiconductor dies.

BACKGROUND

Semiconductor dies are typically packaged by mounting the die to asubstrate and encasing the die within a protective plastic coveringand/or metal heat spreader. The die may include functional features,such as memory cells, processor or logic circuits, and powerdistribution circuits, as well as bond pads electrically connected tothe functional features. The bond pads can be electrically connected toterminals outside the protective covering to allow the die to beconnected to higher level circuitry. Within some packages, semiconductordies can be stacked upon and electrically connected to one another byindividual interconnects placed between adjacent dies. In such packages,each interconnect can include a conductive material (e.g., solder) and apair of contacts on opposing surfaces of adjacent dies. For example, ametal solder can be placed between the contacts and reflowed to form aconductive joint.

One challenge with traditional solder joints is that they can besusceptible to breakage during assembly of the dies. For example, thesolder joints can be damaged if excessive force is applied duringbonding of adjacent dies. This can lead to an open-circuit or high ohmicresistance across the joint, or alternatively can cause the joint toincrease in diameter until it mechanically contacts one or more adjacentsolder joints, creating an electrical short circuit. Accordingly, thereis a need for more mechanically robust solder interconnects between thestacked die within semiconductor device assemblies.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a cross-sectional view of a semiconductor device assemblyhaving interconnects and die support structures in accordance with anembodiment of the present technology.

FIGS. 2A-2C are enlarged cross-sectional views of a semiconductor deviceassembly showing interconnects and a die support structure configured inaccordance with an embodiment of the present technology.

FIGS. 3A and 3B are cross-sectional views illustrating a semiconductordevice assembly at various stages in a method of manufacture inaccordance with selected embodiments of the present technology.

FIGS. 4A-4C are cross-sectional views illustrating a semiconductordevice assembly at various stages in a method for making die supportstructures in accordance with selected embodiments of the presenttechnology.

FIGS. 5A-5C are cross-sectional views illustrating a semiconductordevice assembly at various stages in a method for making die supportstructures in accordance with selected embodiments of the presenttechnology.

FIG. 6 is a flow chart illustrating a method of making a semiconductordevice assembly in accordance with one embodiment of the presenttechnology.

FIG. 7 is a schematic view of a system that includes a semiconductordevice assembly configured in accordance with an embodiment of thepresent technology.

DETAILED DESCRIPTION

In the following description, numerous specific details are discussed toprovide a thorough and enabling description for embodiments of thepresent technology. One skilled in the relevant art, however, willrecognize that the disclosure can be practiced without one or more ofthe specific details. In other instances, well-known structures oroperations often associated with semiconductor devices are not shown, orare not described in detail, to avoid obscuring other aspects of thetechnology. In general, it should be understood that various otherdevices, systems, and methods in addition to those specific embodimentsdisclosed herein may be within the scope of the present technology.

As discussed above, semiconductor devices are continually designed withever greater needs for increased mechanical robustness. Accordingly,several embodiments of semiconductor device assemblies in accordancewith the present technology can include die support structures, whichcan provide increased mechanical robustness to stacked semiconductordies of the assembly.

Several embodiments of the present technology are directed tosemiconductor device assemblies, semiconductor packages, systemsincluding semiconductor devices, and methods of making and operatingsemiconductor devices. In one embodiment, a semiconductor deviceassembly includes a first semiconductor die and a second semiconductordie disposed over the first semiconductor die. The assembly furtherincludes a plurality of die support structures between the first andsecond semiconductor dies and a plurality of interconnects between thefirst and second semiconductor dies. Each of the plurality of diesupport structures includes a stand-off pillar and a stand-off padhaving a first bond material with a first solder joint thickness betweenthem. Each of the plurality of interconnects includes a conductivepillar and a conductive pad having a second bond material with a secondsolder joint thickness between them. The first solder joint thickness isless than the second solder joint thickness.

Embodiments of semiconductor device assemblies having die supportstructures are described below. In various embodiments, the die supportstructures can be configured to mechanically support interconnectspositioned between stacked dies in a semiconductor device assembly. Thedie support structures can also optionally be configured to provideelectrical interconnection between adjacent dies, or thermal pathwaysfor conducting heat through the stacked dies. The term “semiconductordevice assembly” can refer to an assembly of one or more semiconductordevices, semiconductor device packages, and/or substrates (e.g.,interposer, support, or other suitable substrates). The semiconductordevice assembly can be manufactured, for example, in discrete packageform, strip or matrix form, and/or wafer panel form. The term“semiconductor device” generally refers to a solid-state device thatincludes semiconductor material. A semiconductor device can include, forexample, a semiconductor substrate, wafer, panel, or die that issingulated from a wafer or substrate. Throughout the disclosure,semiconductor devices are generally described in the context ofsemiconductor dies; however, semiconductor devices are not limited tosemiconductor dies.

The term “semiconductor device package” can refer to an arrangement withone or more semiconductor devices incorporated into a common package. Asemiconductor package can include a housing or casing that partially orcompletely encapsulates at least one semiconductor device. Asemiconductor device package can also include an interposer substratethat carries one or more semiconductor devices and is attached to orotherwise incorporated into the casing.

As used herein, the terms “vertical,” “lateral,” “upper,” and “lower”can refer to relative directions or positions of features in thesemiconductor device assembly view of the orientation shown in theFigures. For example, “upper” or “uppermost” can refer to a featurepositioned closer to the top of a page than another feature. Theseterms, however, should be construed broadly to include semiconductordevices and semiconductor device assemblies having other orientations,such as inverted or inclined orientations where top/bottom, over/under,above/below, up/down, and left/right can be interchanged depending onthe orientation.

FIG. 1 is a cross-sectional view of a semiconductor device assembly 100(“assembly 100”) having first and second die support structures 102 aand 102 b (collectively “die support structures 102”) configured inaccordance with an embodiment of the present technology. The assembly100 includes a first semiconductor die 104 a, a second semiconductor die104 b (collectively “semiconductor dies 104”), and an array ofindividual interconnects 106 extending vertically between first andsecond sides 108 a and 108 b of the semiconductor dies 104 a and 104 b,respectively. The interconnects 106 can each include, for example, afirst conductive feature (e.g., a conductive pad 110) on the first side108 a of the first semiconductor die 104 a, a second conductive feature(e.g., a conductive pillar 112) on the second side 108 b of the secondsemiconductor die 104 b, and a bond material 114 bonding the conductivepillar 112 to the conductive pad 110.

The die support structures 102 extend between peripheral regions 116 ofthe semiconductor dies 104 on opposite sides of the array ofinterconnects 106. The die support structures 102 can each include afirst protruding feature (e.g., a stand-off pad 118) on the first side108 a of the first semiconductor die 104 a, a second protruding feature(e.g., a stand-off pillar 120) on the second side 108 b of the secondsemiconductor die 104 b, and optionally a bond material 122 (e.g., ametal solder joint) coupling the stand-off pillar 120 to the stand-offpad 118. In some embodiments, the individual die support structures 102can be dummy structures that are electrically isolated from othercircuit elements of the semiconductor dies 104. In other embodiments,one or more of the die support structures 102 can be configured toprovide an electrical interconnection between the semiconductor dies 104in a manner similar to the interconnects 106. In various embodimentsdescribed in greater detail below, the die support structures 102 areconfigured to mechanically support the dies 104 and prevent or at leastinhibit warpage of the dies 104, such as during device manufacture.

In practice, the assembly 100 can include a greater number ofinterconnects 106 and/or die support structures 102 than shown in theillustrated embodiments. For example, the assembly 100 can include tens,hundreds, thousands, or more interconnects 106 arrayed between the dies104. Additionally, in various embodiments die support structures 102 canbe positioned interstitially between individual and/or groups ofinterconnects 106 (e.g., between a group of 5, 20, 100, or moreinterconnects within an array). For example, in some embodiments a diesupport structure 102 c (shown in hidden lines) can be positionedbetween medial regions 124 near the center of the semiconductor dies104. In other embodiments, die support structures 102 can be positionedat a variety of other positions between the semiconductor dies 104.

As further shown in FIG. 1, each of the semiconductor dies 104 includesa semiconductor substrate 126 (e.g., a silicon substrate, a galliumarsenide substrate, an organic laminate substrate, etc.) andthrough-substrate vias (TSVs) 128 extending through the substrate 126from the first side 108 a to the second side 108 b of the die 104. TheTSVs 128 are coupled to corresponding interconnects 106. In someembodiments, the TSVs 128 can be coupled to substrate pads 130 or otherconductive features located on either side of the semiconductorsubstrate 126.

Each substrate 126 can include integrated circuitry 132 (shownschematically) coupled to one or more of the substrate pads 130 and/orthe TSVs 128. The integrated circuitry 132 can include, for example, amemory circuit (e.g., a dynamic random memory (DRAM)), a controllercircuit (e.g., a DRAM controller), a logic circuit, and/or othercircuits. In some embodiments, the assembly 100 can include otherstructures and features, such as an underfill material (not shown)deposited or otherwise formed around and/or between the semiconductordies 104. In the embodiment illustrated in FIG. 1, the assembly 100includes two semiconductor dies 104. In practice, however, the assembly100 can include a different number of semiconductor dies, such as threedies, four dies, eight dies, sixteen dies, or more. For example, inanother embodiment, the assembly 100 can include a third semiconductordie 104 c (shown in hidden lines) on the second semiconductor die 104 b,and a fourth semiconductor die 104 d (shown in hidden lines) on thefirst semiconductor die 104 a. In some embodiments, the assembly 100 caninclude a casing (not shown), such as a thermally conductive casing,that encloses the semiconductor dies 104 within an enclosure. In theseand other embodiments, the assembly 100 can include a support substrate(not shown), such as an interposer and/or a printed circuit board,configured to operably couple the semiconductor dies 104 to externalcircuitry (not shown).

FIG. 2A is an enlarged cross-sectional view showing severalinterconnects 106 and the die support structure 102 a configured inaccordance with an embodiment of the present technology. Referring toFIG. 2A, the die support structure 102 a includes the stand-off pad 118,the stand-off pillar 120, and the bond material 122 coupling an endportion of the stand-off pillar 120 to an end portion of the stand-offpad 118. Each interconnect 106 includes a conductive pad 110, aconductive pillar 112, and a bond material 114 coupling an end portionof the conductive pillar 112 to an end portion of the conductive pad110. The conductive pad 110 can be coupled to or form a part of a firstredistribution structure 265 a formed on the first side 108 a of thefirst semiconductor die 104 a. The conductive pillar 112 can be coupledto or form a part of a second redistribution structure 265 b formed onthe second side of the second semiconductor die 104 b. Each of theredistribution structures 265 can include various conductive features233 and a passivation material 236 (e.g., an oxide material) configuredto provide electrical isolation between the conductive features 233. Theconductive features 233 can include, for example, individual metaltraces and/or pads that are coupled to one or more of the interconnects106, the substrate pads 130 (FIG. 1), the TSVs 128, etc.

FIG. 2B is a further enlarged cross-sectional view showing one of theinterconnects 106 in even more detail, in accordance with one aspect ofthe present technology. The conductive pillar 112 of the interconnect106 includes an end portion attached to the conductive pad 110 by thebond material 114. The interconnect 106 can also include a first barriermaterial 255 (e.g., nickel, nickel-based intermetallic and/or gold)formed over the end portion of the conductive pillar 112, and secondbarrier material 253 (e.g., nickel, nickel-based intermetallic and/orgold) formed over the conductive pad 110. The barrier materials canfacilitate bonding and/or prevent or at least inhibit theelectromigration of copper or other metals used to form the conductivepillar 112 and the conductive pad 110. The bond material 114 bridges afirst gap g₁ (also known to those skilled in the art as a solder jointthickness) between the conductive pillar 112 and the conductive pad 110.The solder joint thickness g₁ is dictated at least in part by a firstprojection height d₁ of the conductive pillar 112 from the second side108 b of the second semiconductor die 104 b.

FIG. 2C is a further enlarged cross-sectional view showing the diesupport structure 102 a of FIG. 2A in even more detail. The die supportstructure 102 a further includes a bond material 122, a first barriermaterial 243 (e.g., nickel, nickel-based intermetallic and/or gold)between the bond material 122 and the stand-off pad 118, and a secondbarrier material 245 (e.g., nickel, nickel-based intermetallic and/orgold) between the bond material 122 and the stand-off pillar 120. Thestand-off pillar 120 of the die support structure 102 a projects fromthe second side 108 b of the second semiconductor die 104 b to a secondheight d₂ greater than the first height d₁ of the conductive pillar 112of the individual interconnects 106. This reduces the size of a secondgap g₂ (e.g., a die support structure solder joint thickness) bridged bythe bond material 122 of the die support structure 102 a relative to thefirst gap g₁ bridged by the bond material 114 of the individualinterconnects 106. As a result, the die support structure 102 has asmaller solder joint thickness g₂ than the solder joint thickness g₁ ofthe interconnects 106. In some embodiments, the stand-off pad 118 canalso project from the first side 108 a of the first semiconductor die104 a by a greater amount than conductive pad 110, further reducing thesize of the second gap g₂ relative to the first gap g₁.

In accordance with one aspect of the present technology, providing adevice assembly 100 with die support structures 102 having a smallersolder joint thickness g₂ than the solder joint thickness g₁ of theinterconnects 106 of the device assembly 100 simplifies and improves theyield of the manufacturing of the device assembly 100. In this regard,one challenge with forming interconnects between semiconductor dies isthat semiconductor dies can have an intrinsic amount of die warpage,which can produce tensile and/or compressive forces on the interconnectsbetween dies. In the absence of a die support structure, these forcescan damage the interconnects during assembly of the device, eitherpulling interconnects apart (e.g., the tensile force) and causing opencircuits, or excessively compressing interconnects (e.g., thecompressive force) and causing the bond materials from adjacentinterconnects to meet and create short circuits. By providing diesupport structures 102 around peripheral regions 116 of a die (e.g., andoptionally in medial regions 124), a thermo-compressive bondingoperation can be used to minimize the solder joint thickness g₂ of thedie support structures 102 (e.g., to compress the die support structures102 until the stand-off pillars 120 meet or nearly meet stand-off pads118) while maintaining the solder joint thickness g₁ of theinterconnects 106 within a desired range. The compressive bondingoperation can also counteract any intrinsic die warpage by forcing a dieor dies into parallel planar alignment, not only in an uppermost diebeing added to a stack, but in every die in the stack that mightotherwise be subject to warpage during inadvertent reflow of its solderconnections.

In accordance with another aspect of the present technology, themechanical strength of the die support structures 102 can permit athermo-compressive bonding operation to utilize force feedback as acontrol mechanism for the operation, rather than a spatial z-dimensionoffset, which can further simplify and improve the quality of thebonding operation. For example, during a thermo-compressive bondingoperation, a force can be applied to a stack of two or more dies whilethe bond materials in the die support structures 102 and interconnects106 are reflowed, such that the die support structures are fullycompressed (e.g., the stand-off pillars 120 meet or nearly meetstand-off pads 118) and a measured resistance to the force is determinedto increase as a result. The measured increase in resistance to theapplied compressive force can be used to determine that the gap g₂between at least some of the stand-off pillars 120 and stand-off pads118 has been reduced to about 0, and that the gap g₁ between theconductive pillars 112 and the conductive pads 110 has therefore beenreduced to within a known range (e.g., due to the predetermineddifference between the height d₁ of the conductive pillars 112 and theheight d₂ of the stand-off pillars 120 and optionally the height d₃ ofthe stand-off pads 118). As will be readily apparent to those skilled inthe art, measuring the resistance to a compressive force in such abonding operation is a much simpler engineering challenge than measuringthe z-dimension offset of a bond head over such a small range (e.g.,measuring offsets of less than 1 μm).

In accordance with one aspect of the subject technology, depending uponthe tolerance of the manufacturing steps used to fabricate theconductive pillars 112 and the stand-off pillars 120, there may be somevariation in the height thereof (e.g., such that individual ones of theconductive pillars 112 and the stand-off pillars 120 may be anywherefrom 1 to 5 μm out of co-planar alignment). Accordingly, the gap g₂between at least some of the stand-off pillars 120 and stand-off pads118 may be greater than 0 at the end of the thermo-compressive bondingoperation. Nevertheless, as will be readily apparent to one skilled inthe art, the thermo-compressive bonding operation will cause manycorresponding pairs of the stand-off pillars 120 and stand-off pads 118to come into contact, or nearly into contact, such that an end of thethermo-compressive bonding operation can be detected.

FIGS. 3A and 3B are cross-sectional views illustrating semiconductordevice assembly 100 at various stages in a method of manufacture inaccordance with selected embodiments of the present technology. In FIG.3A, assembly 100 is illustrated at the beginning of a thermo-compressivebonding operation, in which the heating has caused the bond material 114in the interconnects 106 to reflow and electrically connect the firstand second barrier materials 255 and 253 of the conductive pillar 112and the conductive pad 110, respectively. The heat has similarly causedthe bond material 122 in the die support structures 102 to reflow andwet the first and second barrier materials 243 and 245 of the stand-offpad 118 and the stand-off pillar 120, respectively. Before exerting thecompressive force and heat, the gap g₂ bridged by the bond material 122of the die support structure 102 a is larger than about 0 and the gap g₁bridged by the bond material 114 of the interconnect 106 is larger thana desired final amount.

In FIG. 3B, assembly 100 is illustrated at the completion of thethermo-compressive bonding operation, in which the compressive force hascaused the gap g₂ between the stand-off pad 118 and the stand-off pillar120 (e.g., the gap between the barrier materials 243 and 245) to bereduced to about 0 μm, and the gap g₁ bridged by the bond material 114of the interconnect 106 to be reduced to within a desired range. As canbe seen with reference to FIG. 3B, the greater width of the stand-offpad 118 relative to the stand-off pillar 120 permits the excess bondmaterial 122 to remain attached to the stand-off pad 118, reducing therisk of the bond material 122 shorting to adjacent conductivestructures. By cooling assembly 100 at this point, the bond materials122 and 114 can be solidified, securing the semiconductor dies 104 a and104 b in a parallel planar alignment (e.g., overcoming any intrinsicwarpage) into which the compressive operation has forced them.

In accordance with one aspect of the present technology, the inclusionof die support structures on a wafer or panel allows wafer- orpanel-level assembly of die stacks without experiencing the reduction inyield caused by die warpage defects in traditional wafer- or panel-levelassembly operations. In this regard, the arrangement of die supportstructures on a wafer or panel can be selected to balance a need forwarpage mitigation with an amount of real estate dedicated to the diesupport structures (e.g., due to the greater size of the supportstructures than the interconnects). In one embodiment, the loss ofusable die area due to the inclusion of die support structures can bemitigated by utilizing electrically active die support structures toreplace interconnects (e.g., by electrically connecting a die supportstructure to circuit elements in the dies) rather than using dummy(e.g., electrically isolated or not active) die support structures thatprovide no electrical function in the circuits of the dies.

In accordance with another aspect of the present technology, the use ofa bond material 122 in the die support structure 102 can providemechanical support to counteract the tensile forces tending to pullapart interconnects 106 due to intrinsic die warpage. Accordingly, inone embodiment, the stand-off pillar 120 and stand-off pad 118 can bemade of a solder-wettable material (e.g., copper, gold, alloys thereof,etc.). In another embodiment, however, where tensile forces are of lessconcern, the bond material 122 may be omitted from a support structure102, which can still provide mechanical support during athermo-compressive bonding operation in the absence of any bond material(e.g., due to the greater height of the stand-off pillar 120 than theconductive pillars 112 of the interconnects 106). One benefit of usingdie support structures 102 which are larger than (e.g., have a greaterwidth than) the interconnects 106 is the improved mechanical supportthat the die support structures 102 can provide against tensile andcompressive forces (e.g., the die support structures 102 are moremechanically robust and can better endure compression during athermo-compressive bonding operation, and moreover have greater surfacearea for bonding pillars and pads to thereby better resist tensileforces).

Another benefit of using die support structures 102 which have a greaterwidth than the interconnects 106 is that a single operation can be usedto plate the stand-off pillars and the conductive pillars to differentheights, thereby simplifying manufacturing. In this regard, apillar-plating operation in which the eventual height of a pillar isdependent upon the width of a mask opening in which the pillar is platedcan be used. For example, FIGS. 4A to 4C are cross-sectional viewsillustrating the second semiconductor die 104 b at various stages in amethod for making die support structures 102 and interconnects 106 inaccordance with an embodiment of the present technology. Referring firstto FIG. 4A, the second semiconductor die 104 b is shown after the TSVs128 have been formed in the substrate 126 and the conductive trace 233and substrate pads 130 and 130 a have been formed in the dielectricmaterial 236 over the substrate 126. As shown, some of the pads 130(e.g., on which interconnects are to be formed) are coupled to TSVs 128or to conductive traces 233. Another substrate pad 130 a (e.g., on whicha die support structure is to be formed) is electrically isolated by thedielectric material 236. In several embodiments, the conductive trace233 and the substrate pads 130 and 130 a can each include copper, gold,alloys thereof, and/or other suitable conductive materials.

FIG. 4B shows the second semiconductor die 104 b after forming a mask401 (e.g., a photoresist mask, hard mask, etc.) over the die 104 b, withopenings 402 and 403 over the substrate pads 130 and 130 a. As shown inFIG. 4B, the openings 402 and 403 expose portions of the underlyingsubstrate pads 130 and 130 a. As can be seen with reference to FIG. 4B,the opening 403 over substrate pad 130 a over which a stand-off pillar120 for a die support structure 102 will be plated has a width w₁ thatis greater than the width w₂ of the opening 402 over the substrate pad130 over which a conductive pillar 112 for an interconnect 106 will beplated. The greater width w₁ of the opening 403 will permit a tallerstand-off pillar to be plated over the substrate pad 130 a in asubsequent step (e.g., the same step in which conductive pillars areplated over substrate pads 130), as the height of a pillar formed by theplating operation is at least in part dependent upon the width of theopening in which the pillar is plated.

Turning to FIG. 4C, the second semiconductor die 104 b is shown afterstand-off pillars 120 and conductive pillars 112 have been formed on thesubstrate pads 130 a and 130, respectively. In several embodiments, theconductive pillars 112 and stand-off pillars 120 can be formed bydepositing a seed material, creating a photo resist mask andelectroplating a conductive material (e.g., copper) over the seedmaterial in the photo resist mask openings 402 and 403 on the substratepads 130 and 130 a. In other embodiments, the conductive pillars 112 andstand-off pillars 120 can be formed by other suitable depositiontechniques, such as sputter deposition. By using a method for formingthe conductive pillars and stand-off pillars in which the rate of growthof the conductive material is dependent upon the width of the maskopening, a single operation can provide stand-off pillars 120 (e.g.,which will be used to form die support structures 102) with a greaterheight d₂ than the height d₁ of the conductive pillars 112 (e.g., whichwill be used to form interconnects 106). In the illustrated embodiment,a barrier material 245 and 255 (e.g., nickel, nickel-based intermetallicand/or gold) has also been electroplated in sequence onto the conductivematerial of the stand-off pillar 120 and conductive pillars 112. Thebarrier materials 245 and 255 can facilitate bonding and/or prevent orat least inhibit the electromigration of copper or other metals used toform the conductive pillars 112 and the stand-off pillars 120 insubsequent steps.

In one embodiment of the present technology, the stand-off pads 118 usedin the formation of die support structures 102 may have greater widthsthan the conductive-pads 110 used in the formation of die interconnects106, both to provide increased robustness for the die supportstructures, and to facilitate the growth of stand-off pads 118 to agreater height than that of the conductive pads 110, using a singleplating operation. For example, FIGS. 5A to 5C are cross-sectional viewsillustrating the first semiconductor die 104 a at various stages in amethod for making die support structures 102 and interconnects 106 inaccordance with an embodiment of the present technology. Referring firstto FIG. 5A, the first semiconductor die 104 a is shown after the TSVs128 have been formed in the substrate 126 and the dielectric layer 236has been disposed over the substrate 126 and patterned with a mask 501(e.g., a photoresist mask, hard mask, etc.) having openings 502 and 503.The opening 502 over the TSV 128 will form the site for a platingoperation for a conductive pad 110 for an eventual interconnect 106,while the opening 503 over the substrate 126 (e.g., isolated from othercircuit elements in this embodiment) will form the site for a platingoperation for a stand-off pad 118 for an eventual die support structure102. As can be seen with reference to FIG. 5A, the opening 503 in whicha stand-off pad 118 will be formed has a greater width w₃ than the widthw₄ of the opening 502 in which the conductive pad 110 will be formed.The greater width w₃ of the opening 503 will permit a taller stand-offpad to be plated over the substrate 126 in a subsequent step (e.g., thesame step in which conductive pads are plated over TSVs 128), as theheight of a pad formed by the plating operation is at least in partdependent upon the width of the opening in which the pad is plated.

Turning to FIG. 5B, the first semiconductor die 104 a is shown afterstand-off pads 118 and conductive pads 110 have been formed. In severalembodiments, the conductive pads 110 and stand-off pads 118 can beformed by depositing a seed material, creating a photo resist mask andelectroplating a conductive material (e.g., copper) over the seedmaterial in the mask openings 502 and 503 on the dielectric layer 236and/or TSVs 128. In other embodiments, the conductive pads 110 andstand-off pads 118 can be formed by other suitable depositiontechniques, such as sputter deposition. By using a method for formingthe conductive pads and stand-off pads in which the rate of growth ofthe conductive material is dependent upon the width of the mask opening,a single operation can provide stand-off pads 118 (e.g., which will beused to form die support structures 102) with a greater height than theheight of the conductive pads 110 (e.g., which will be used to forminterconnects 106). As can be seen with reference to FIG. 5B, thestand-off pad 118 extends above the conductive pads 110 by a height d₃.

Turning to FIG. 5C, the first semiconductor die 104 a is shown after abarrier material 243 and 253 (e.g., nickel, nickel-based intermetallicand/or gold) has been electroplated in sequence onto the conductivematerial of the stand-off pads 118 and conductive pads 110. The barriermaterials can facilitate bonding and/or prevent or at least inhibit theelectromigration of copper or other metals used to form the conductivepads 110 and the stand-off pads 118 in subsequent steps.

FIG. 6 is a flow chart illustrating a method for making a semiconductordevice in accordance with one aspect of the present technology. Themethod includes providing a first semiconductor die including aplurality of stand-off pads and a plurality of conductive pads (box 610)and disposing a second semiconductor die over the first semiconductordie (box 620). The second semiconductor die includes a plurality ofstand-off pillars having a first height and a plurality of conductivepillars having a second height less than the first height. Each of theplurality of stand-off pillars is separated from a corresponding one ofthe plurality of stand-off pads by a first bond material, and each ofthe plurality of conductive pillars is separated from a correspondingone of the plurality of conductive pads by a second bond material. Themethod further includes reflowing the first and second bond materials(box 630) and moving at least one of the first semiconductor die and thesecond semiconductor die towards each other, such that each of theplurality of stand-off pillars contacts the corresponding one of theplurality of stand-off pads (box 640). The method can further includemeasuring the applied force to determine when the plurality of stand-offpillars contact the plurality of stand-off pads (box 650).

Any one of the die support structures and/or semiconductor deviceassemblies described above with reference to FIGS. 1 through 6 can beincorporated into any of a myriad of larger and/or more complex systems,a representative example of which is system 790 shown schematically inFIG. 7. The system 790 can include a semiconductor device assembly 700,a power source 792, a driver 794, a processor 796, and/or othersubsystems or components 798. The semiconductor device assembly 700 caninclude features generally similar to those of the semiconductor deviceassemblies described above, and can therefore include die supportstructures for mechanically supporting interconnects positioned betweenstacked semiconductor dies of the assembly. The resulting system 790 canperform any of a wide variety of functions such as memory storage, dataprocessing, and/or other suitable functions. Accordingly, representativesystems 790 can include, without limitation, hand-held devices (e.g.,mobile phones, tablets, digital readers, and digital audio players),computers, vehicle and other machines and appliances. Components of thesystem 790 may be housed in a single unit or distributed over multiple,interconnected units (e.g., through a communications network). Thecomponents of the system 790 can also include remote devices and any ofa wide variety of computer readable media.

From the foregoing, it will be appreciated that specific embodiments ofthe technology have been described herein for purposes of illustrationbut that various modifications may be made without deviating from thedisclosure. Moreover, although advantages associated with certainembodiments of the new technology have been described in the context ofthose embodiments, other embodiments may also exhibit such advantages,and not all embodiments need necessarily exhibit such advantages to fallwithin the scope of the technology. Accordingly, the disclosure andassociated technology can encompass other embodiments not expresslyshown or described herein.

I/We claim:
 1. A semiconductor package comprising a plurality of diesarranged in a stack, wherein adjacent ones of the plurality of dies areseparated by a plurality of interconnects and a plurality of die supportstructures, wherein each of the plurality of die support structuresincludes a stand-off pillar and a stand-off pad with a first distancebetween the stand-off pillar and the stand-off pad, wherein each of theplurality of interconnects includes a conductive pillar, a conductivepad, and a bond material with a solder joint thickness between theconductive pillar and the conductive pad, and wherein the first distanceis less than the solder joint thickness.
 2. The semiconductor package ofclaim 1, wherein the plurality of die support structures includes diesupport structures disposed about a periphery of the semiconductorpackage.
 3. The semiconductor package of claim 1, wherein the pluralityof die support structures includes die support structures disposed in amedial region of the semiconductor device assembly.
 4. The semiconductorpackage of claim 1, wherein the plurality of dies includes more than twodies.
 5. The semiconductor package of claim 1, wherein the plurality ofdies includes at least one memory die.
 6. The semiconductor package ofclaim 1, wherein each of the plurality of die support structuresincludes a second bond material between the stand-off pillar and thestand-off pad.
 7. The semiconductor device assembly of claim 1, whereinthe stand-off pillar of each of the plurality of die support structureshas a first width and wherein the conductive pillar of each of theplurality of interconnects has a second width less than the first width.8. The semiconductor device assembly of claim 1, wherein the stand-offpad of each of the plurality of die support structures has a first widthand wherein the conductive pad of each of the plurality of interconnectshas a second width of less than the first width.
 9. The semiconductordevice assembly of claim 1, wherein the stand-off pad of each of theplurality of die support structures has a first width and wherein thestand-off pillar of each of the plurality of die support structures hasa second width of less than the first width.
 10. A method of making asemiconductor device assembly, comprising the steps of: providing afirst semiconductor die including a plurality of stand-off pads and aplurality of conductive pads; disposing a second semiconductor die overa first semiconductor die, the second semiconductor die including aplurality of stand-off pillars having a first height and a plurality ofconductive pillars having a second height less than the first height,wherein each of the plurality of stand-off pillars is separated from acorresponding one of the plurality of stand-off pads by a first bondmaterial, and each of the plurality of conductive pillars is separatedfrom a corresponding one of the plurality of conductive pads by a secondbond material; reflowing the first and second bond materials; and movingat least one of the first semiconductor die and the second semiconductordie toward each other, such that each of the plurality of stand-offpillars contacts the corresponding one of the plurality of stand-offpads.
 11. The method of claim 10, further comprising the step of:solidifying the first and second bond materials after the plurality ofstand-off pillars contact the plurality of stand-off pads.
 12. Themethod of claim 10, wherein moving the at least one of the firstsemiconductor die and the second semiconductor die toward each othercauses the first bond material to displace from between each of theplurality of stand-off pillars and the corresponding one of theplurality of stand-off pads to a peripheral region of the correspondingone of the plurality of stand-off pads.
 13. The method of claim 10,wherein the moving comprises apply compressive force to at least one ofthe first semiconductor die and the second semiconductor die.
 14. Themethod of claim 13, further comprising maintaining the compressive forceduring a cooling operation in which the first and second bond materialsis solidified.
 15. The method of claim 13, further comprising measuringthe applied compressive force to determine when the plurality ofstand-off pillars contacts the plurality of stand-off pads.
 16. Themethod of claim 15, wherein determining when the plurality of stand-offpillars contacts the plurality of stand-off pads comprising detecting anincrease in resistance to the applied compressive force.
 17. The methodof claim 10, wherein each of the plurality of stand-off pillars has afirst width and wherein each of the plurality of conductive pillars hasa second width less than the first width.
 18. The method of claim 10,wherein each of the plurality of stand-off pads has a first width andwherein each of the plurality of conductive pads has a second width ofless than the first width.
 19. The method of claim 10, wherein each ofthe plurality of stand-off pads has a first width and wherein each ofthe plurality of stand-off pillars has a second width of less than thefirst width.
 20. A semiconductor package comprising a plurality of diesarranged in a stack, wherein adjacent ones of the plurality of dies areseparated by a plurality of interconnects and a plurality of die supportstructures, wherein each of the plurality of die support structuresincludes a stand-off pillar in direct contact with a stand-off pad,wherein each of the plurality of interconnects includes a conductivepillar, a conductive pad, and a first bond material with a jointthickness between the conductive pillar and the conductive pad, andwherein each of the plurality of die support structures includes asecond bond material disposed peripherally around the stand-off pillarand in contact with the stand-off pad.